It was the visitors who settled the better of the two teams early on and carved out the opening goal with the game's first real opportunity eight minutes in.
Darren Mackie was quicker to a loose ball than Ross Tokely and his tenacity was rewarded as Darren Young scampered down the left, cutting inside Russell Duncan and then Tokely, before unleashing a low shot that Zigi Malkowski allowed to squirm under his body and into the net.
Aberdeen were playing all the football and it took Caley Thistle until the latter stages of the first half to pose any kind of threat to Jamie Langfield's goal.
Firstly Richard Hastings was only denied a goal by some fine defending from Jefferey de Visscher and from the resultant corner Ian Black could only fire his volley a yard over the crossbar.
It was then the turn of Dennis Wyness to go close as he tried to bend the ball into the top corner after being superbly set up by Don Cowie.
Wyness was seeking his 100th goal in Caley Thistle colours and he came even nearer to achieving that landmark moments later, flicking Tokely's cross towards goal, only to see the ball land on the roof of the net.
The former Hearts striker, however, finally reached his century after the break when he latched onto a wonderful cross from Hastings to send in a header that left Langfield with no chance on 58 minutes.
But Inverness were only on level terms for four minutes before Aberdeen regained their lead.
De Visscher's free-kick caused panic in the home defence and despite both Lee Miller and Zander Diamond being in close attendance, it was the unfortunate Tokely who got the final touch as the ball bounced into the corner of the net past a stranded Malkowski.
Only a wonderful save by Langfield from Duncan's well-struck volley prevented Caley Thistle from a second equaliser, although Aberdeen could have eased nerves towards the end when sub Steve Lovell found himself with a clear sight of goal 12 yards out, only to drag his shot just wide of the post.